Inventor

COLVIN NEIL K

US23 patents

⚠️ This page may combine multiple inventors who share the name “COLVIN NEIL K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

COLVIN NEIL K

AXCELIS TECH INC

Ion source arc chamber seal

In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source

Multi-piece electrode aperture

Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

Hydrogen bleed gas for an ion source housing

Sensor for ion implanter

Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam

Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam

Ion source repeller shield comprising a labyrinth seal

Hydrogen generator for an ion implanter

Hydrogen generator for an ion implanter

Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam

Ion source liner having a lip for ion implantation systems

Lanthanated tungsten ion source and beamline components

Ion source cathode shield

Shielded gas inlet for an ion source

System and method for extending a lifetime of an ion source for molecular carbon implants

COLVIN NEIL K

Extraction electrode assembly voltage modulation in an ion implantation system

In-vacuum beam defining aperture cleaning for particle reduction

Automatic control system for selection and optimization of co-gas flow levels

Adjustable louvered plasma electron flood enclosure

Implementation of co-gases for germanium and boron ion implants

Hydrogen COGas for carbon implant