Inventor
KOH TRAVIS
US12 patents
Patents
12 patentsUS10685807B2Jun 16, 2020
Creating ion energy distribution functions (IEDF)
APPLIED MATERIALS INC38 citations98
US10373804B2Aug 6, 2019
System for tunable workpiece biasing in a plasma reactor
APPLIED MATERIALS INC87 citations97
US10312048B2Jun 4, 2019
Creating ion energy distribution functions (IEDF)
APPLIED MATERIALS INC48 citations97
US10923320B2Feb 16, 2021
System for tunable workpiece biasing in a plasma reactor
APPLIED MATERIALS INC33 citations93
US11728124B2Aug 15, 2023
Creating ion energy distribution functions (IEDF)
APPLIED MATERIALS INC5 citations86
US11069504B2Jul 20, 2021
Creating ion energy distribution functions (IEDF)
APPLIED MATERIALS INC7 citations84
US9613783B2Apr 4, 2017
Method and apparatus for controlling a magnetic field in a plasma chamber
APPLIED MATERIALS INC7 citations84
US10115566B2Oct 30, 2018
Method and apparatus for controlling a magnetic field in a plasma chamber
APPLIED MATERIALS INC4 citations73
US12094707B2Sep 17, 2024
Plasma enhanced CVD with periodic high voltage bias
APPLIED MATERIALS INC0 citations62
US10840086B2Nov 17, 2020
Plasma enhanced CVD with periodic high voltage bias
APPLIED MATERIALS INC0 citations52
US12456611B2Oct 28, 2025
Systems and methods for controlling a voltage waveform at a substrate during plasma processing
APPLIED MATERIALS INC0 citations51
US9659751B2May 23, 2017
System and method for selective coil excitation in inductively coupled plasma processing reactors
APPLIED MATERIALS INC0 citations41