Inventor
SHENG SHURAN
US22 patents
⚠️ This page may combine multiple inventors who share the name “SHENG SHURAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS7582515B2Sep 1, 2009
Multi-junction solar cells and methods and apparatuses for forming the same
APPLIED MATERIALS INC36 citations92
US7741144B2Jun 22, 2010
Plasma treatment between deposition processes
APPLIED MATERIALS INC14 citations83
US11094647B2Aug 17, 2021
Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems
APPLIED MATERIALS INC3 citations72
US10330612B2Jun 25, 2019
Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures
APPLIED MATERIALS INC6 citations72
US11866821B2Jan 9, 2024
Substrate support cover for high-temperature corrosive environment
APPLIED MATERIALS INC2 citations69
US8728918B2May 20, 2014
Method and apparatus for fabricating silicon heterojunction solar cells
APPLIED MATERIALS INC3 citations62
US7964430B2Jun 21, 2011
Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applications
APPLIED MATERIALS INC2 citations62
US7919398B2Apr 5, 2011
Microcrystalline silicon deposition for thin film solar applications
APPLIED MATERIALS INC3 citations62
US11846011B2Dec 19, 2023
Lid stack for high frequency processing
APPLIED MATERIALS INC0 citations61
US11837448B2Dec 5, 2023
High-temperature chamber and chamber component cleaning and maintenance method and apparatus
APPLIED MATERIALS INC0 citations61
US11499231B2Nov 15, 2022
Lid stack for high frequency processing
APPLIED MATERIALS INC1 citations61
US11215934B2Jan 4, 2022
In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing
APPLIED MATERIALS INC0 citations59
US11768984B2Sep 26, 2023
Parameter sensing and computer modeling for gas delivery health monitoring
APPLIED MATERIALS INC1 citations58
US12013291B2Jun 18, 2024
Advanced temperature monitoring system with expandable modular layout design
APPLIED MATERIALS INC0 citations51
US10047440B2Aug 14, 2018
Methods and apparatus for uniformly and high-rate depositing low resistivity microcrystalline silicon films for display devices
APPLIED MATERIALS INC0 citations50
US8026157B2Sep 27, 2011
Gas mixing method realized by back diffusion in a PECVD system with showerhead
APPLIED MATERIALS INC1 citations47
US11532464B2Dec 20, 2022
Reactor design for large-area VHF plasma processing with improved uniformity
APPLIED MATERIALS INC0 citations46
US10453728B2Oct 22, 2019
Exchange and flip chamber design for heterojunction solar cell formation
APPLIED MATERIALS INC0 citations36