Inventor
GOTTSCHO RICHARD
US13 patents
⚠️ This page may combine multiple inventors who share the name “GOTTSCHO RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS6921724B2Jul 26, 2005
Variable temperature processes for tunable electrostatic chuck
LAM RES CORP102 citations97
US9967965B2May 8, 2018
Distributed, concentric multi-zone plasma source systems, methods and apparatus
LAM RES CORP2 citations69
US10332727B2Jun 25, 2019
Methods for processing substrates using small plasma chambers
LAM RES CORP0 citations52
US9947557B2Apr 17, 2018
Semiconductor processing system having multiple decoupled plasma sources
LAM RES CORP0 citations52
US9911578B2Mar 6, 2018
Small plasma chamber systems and methods
LAM RES CORP0 citations52
US10424460B2Sep 24, 2019
Systems, methods and apparatus for choked flow element extraction
LAM RES CORP0 citations51
SHAJII ALI
4 patentsUS9449793B2Sep 20, 2016
Systems, methods and apparatus for choked flow element extraction
SHAJII ALI469 citations97
US10283325B2May 7, 2019
Distributed multi-zone plasma source systems, methods and apparatus
SHAJII ALI1 citations61
US8999104B2Apr 7, 2015
Systems, methods and apparatus for separate plasma source control
SHAJII ALI2 citations61
US9155181B2Oct 6, 2015
Distributed multi-zone plasma source systems, methods and apparatus
SHAJII ALI1 citations51