Inventor
GANGAKHEDKAR KAUSHAL
US29 patents
⚠️ This page may combine multiple inventors who share the name “GANGAKHEDKAR KAUSHAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
26 patentsUS10262888B2Apr 16, 2019
Apparatus and methods for wafer rotation in carousel susceptor
APPLIED MATERIALS INC18 citations94
US10633740B2Apr 28, 2020
Methods for depositing coatings on aerospace components
APPLIED MATERIALS INC19 citations93
US11180851B2Nov 23, 2021
Rotary reactor for uniform particle coating with thin films
APPLIED MATERIALS INC9 citations85
US11174552B2Nov 16, 2021
Rotary reactor for uniform particle coating with thin films
APPLIED MATERIALS INC12 citations85
US9922860B2Mar 20, 2018
Apparatus and methods for wafer chucking on a susceptor for ALD
APPLIED MATERIALS INC5 citations84
US11094577B2Aug 17, 2021
Apparatus and methods for wafer chucking on a susceptor for ALD
APPLIED MATERIALS INC2 citations73
US10861736B2Dec 8, 2020
Apparatus and methods for wafer rotation in carousel susceptor
APPLIED MATERIALS INC4 citations73
US10774006B2Sep 15, 2020
Microwave and induction heat treatment of ceramic coatings
APPLIED MATERIALS INC2 citations73
US10685864B2Jun 16, 2020
Contour pocket and hybrid susceptor for wafer uniformity
APPLIED MATERIALS INC2 citations73
US10351956B2Jul 16, 2019
Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD
APPLIED MATERIALS INC3 citations73
US11430680B2Aug 30, 2022
Position and temperature monitoring of ALD platen susceptor
APPLIED MATERIALS INC2 citations72
US11242599B2Feb 8, 2022
Particle coating methods and apparatus
APPLIED MATERIALS INC4 citations72
US10312120B2Jun 4, 2019
Position and temperature monitoring of ALD platen susceptor
APPLIED MATERIALS INC4 citations72
US10121655B2Nov 6, 2018
Lateral plasma/radical source
APPLIED MATERIALS INC3 citations70
US12421601B2Sep 23, 2025
Rotary reactor for uniform particle coating with thin films
APPLIED MATERIALS INC0 citations62
US12230530B2Feb 18, 2025
Apparatus and methods for semiconductor processing
APPLIED MATERIALS INC0 citations62
US12146217B2Nov 19, 2024
Particle coating methods and apparatus
APPLIED MATERIALS INC0 citations62
US12112969B2Oct 8, 2024
Apparatus and methods for wafer chucking on a susceptor for ALD
APPLIED MATERIALS INC0 citations62
US11984343B2May 14, 2024
Apparatus and methods for semiconductor processing
APPLIED MATERIALS INC0 citations62
US11810810B2Nov 7, 2023
Contour pocket and hybrid susceptor for wafer uniformity
APPLIED MATERIALS INC0 citations62
US11560804B2Jan 24, 2023
Methods for depositing coatings on aerospace components
APPLIED MATERIALS INC0 citations62
US11557501B2Jan 17, 2023
Contour pocket and hybrid susceptor for wafer uniformity
APPLIED MATERIALS INC0 citations62
US11384648B2Jul 12, 2022
Methods for depositing coatings on aerospace components
APPLIED MATERIALS INC0 citations62
US11180846B2Nov 23, 2021
Fine leveling of large carousel based susceptor
APPLIED MATERIALS INC0 citations62
US10766824B2Sep 8, 2020
Methods of minimizing particles on wafer from plasma spray coatings
APPLIED MATERIALS INC0 citations52
US10501844B2Dec 10, 2019
Fine leveling of large carousel based susceptor
APPLIED MATERIALS INC0 citations52