Inventor
MINKOVICH ALEX
US7 patents
⚠️ This page may combine multiple inventors who share the name “MINKOVICH ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS9538583B2Jan 3, 2017
Substrate support with switchable multizone heater
APPLIED MATERIALS INC9 citations83
US11430680B2Aug 30, 2022
Position and temperature monitoring of ALD platen susceptor
APPLIED MATERIALS INC2 citations72
US10312120B2Jun 4, 2019
Position and temperature monitoring of ALD platen susceptor
APPLIED MATERIALS INC4 citations72
US10196741B2Feb 5, 2019
Wafer placement and gap control optimization through in situ feedback
APPLIED MATERIALS INC3 citations72
US9296105B2Mar 29, 2016
Vibration-controlled substrate handling robots, systems, and methods
APPLIED MATERIALS INC6 citations68