Inventor
KITAZAWA TAKAHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KITAZAWA TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
10 patentsUS11476167B2Oct 18, 2022
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD4 citations71
US10643869B2May 5, 2020
Light irradiation type heat treatment apparatus and heat treatment method
SCREEN HOLDINGS CO LTD3 citations71
US12057352B2Aug 6, 2024
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD0 citations61
US11516884B2Nov 29, 2022
Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto
SCREEN HOLDINGS CO LTD0 citations60
US12550665B2Feb 10, 2026
Temperature measurement method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations50
US11876006B2Jan 16, 2024
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD0 citations49
US12412761B2Sep 9, 2025
Method of controlling the patterned wafer process temperature using the contact type thermometer in the front side of a dummy substrate to accurately measure emissivity in order to perform temperature measurement using radiation thermometer
SCREEN HOLDINGS CO LTD0 citations47
US12154800B2Nov 26, 2024
Heat treatment apparatus and heat treatment method
SCREEN HOLDINGS CO LTD0 citations45
US12571593B2Mar 10, 2026
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations40
US10784127B2Sep 22, 2020
Method of adjusting measurement position of radiation thermometer and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations39