Inventor
MORI WATARU
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MORI WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
10 patentsUS10991542B2Apr 27, 2021
Charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US10818470B2Oct 27, 2020
Charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US9305745B2Apr 5, 2016
Scanning electron microscope
HITACHI HIGH TECH CORP3 citations72
US12463008B2Nov 4, 2025
Charged particle beam scanning module, charged particle beam device, and computer
HITACHI HIGH TECH CORP0 citations62
US7612336B2Nov 3, 2009
Scanning electron microscope having a monochromator
HITACHI HIGH TECH CORP4 citations62
US10984981B2Apr 20, 2021
Charged particle beam device having inspection scan direction based on scan with smaller dose
HITACHI HIGH TECH CORP1 citations60
US9960006B2May 1, 2018
Charged-particle-beam device
HITACHI HIGH TECH CORP1 citations51
US11152186B2Oct 19, 2021
Charged particle beam device
HITACHI HIGH TECH CORP0 citations47
US10796880B2Oct 6, 2020
Charged particle beam device and charged particle beam device noise source determination method
HITACHI HIGH TECH CORP0 citations41
US10707047B2Jul 7, 2020
Measuring device and measuring method
HITACHI HIGH TECH CORP0 citations41