Inventor
KHER SHREYAS S
US14 patents
⚠️ This page may combine multiple inventors who share the name “KHER SHREYAS S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6858547B2Feb 22, 2005
System and method for forming a gate dielectric
APPLIED MATERIALS INC633 citations98
US7067439B2Jun 27, 2006
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC48 citations94
US8043907B2Oct 25, 2011
Atomic layer deposition processes for non-volatile memory devices
APPLIED MATERIALS INC42 citations92
US7659158B2Feb 9, 2010
Atomic layer deposition processes for non-volatile memory devices
APPLIED MATERIALS INC25 citations92
US7531468B2May 12, 2009
System and method for forming a gate dielectric
APPLIED MATERIALS INC22 citations92
US7304004B2Dec 4, 2007
System and method for forming a gate dielectric
APPLIED MATERIALS INC19 citations92
US7569501B2Aug 4, 2009
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC17 citations91
US7775508B2Aug 17, 2010
Ampoule for liquid draw and vapor draw with a continuous level sensor
APPLIED MATERIALS INC28 citations89
US7871942B2Jan 18, 2011
Methods for manufacturing high dielectric constant film
APPLIED MATERIALS INC6 citations62
US7569500B2Aug 4, 2009
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC2 citations61