Inventor
DEATON PAUL
US13 patents
⚠️ This page may combine multiple inventors who share the name “DEATON PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS5960555AOct 5, 1999
Method and apparatus for purging the back side of a substrate during chemical vapor processing
APPLIED MATERIALS INC92 citations97
US7794544B2Sep 14, 2010
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
APPLIED MATERIALS INC49 citations95
US6048403AApr 11, 2000
Multi-ledge substrate support for a thermal processing chamber
APPLIED MATERIALS INC52 citations95
US9632411B2Apr 25, 2017
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC26 citations93
US6133152AOct 17, 2000
Co-rotating edge ring extension for use in a semiconductor processing chamber
APPLIED MATERIALS INC43 citations92
US6123766ASep 26, 2000
Method and apparatus for achieving temperature uniformity of a substrate
APPLIED MATERIALS INC37 citations92
US6035100AMar 7, 2000
Reflector cover for a semiconductor processing chamber
APPLIED MATERIALS INC25 citations92
US7775508B2Aug 17, 2010
Ampoule for liquid draw and vapor draw with a continuous level sensor
APPLIED MATERIALS INC28 citations89
US9829805B2Nov 28, 2017
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC14 citations83
US9236467B2Jan 12, 2016
Atomic layer deposition of hafnium or zirconium alloy films
APPLIED MATERIALS INC1 citations52