Inventor
OUYE ALAN H
US4 patents
⚠️ This page may combine multiple inventors who share the name “OUYE ALAN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6955211B2Oct 18, 2005
Method and apparatus for gas temperature control in a semiconductor processing system
APPLIED MATERIALS INC70 citations95
US7775508B2Aug 17, 2010
Ampoule for liquid draw and vapor draw with a continuous level sensor
APPLIED MATERIALS INC28 citations89
US11721566B2Aug 8, 2023
Sensor assembly and methods of vapor monitoring in process chambers
APPLIED MATERIALS INC0 citations54