Inventor
NONAKA NAOYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “NONAKA NAOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
7 patentsUS10253429B2Apr 9, 2019
Method for manufacturing epitaxial silicon wafer
SUMCO CORP2 citations70
US9755022B2Sep 5, 2017
Epitaxial silicon wafer having reduced stacking faults
SUMCO CORP4 citations68
US9425264B2Aug 23, 2016
Method for growing an epitaxial film on a phosphorous-doped silicon wafer
SUMCO CORP4 citations68
US11462409B2Oct 4, 2022
Epitaxial silicon wafer, and method for manufacturing epitaxial silicon wafer
SUMCO CORP0 citations54
US12400909B2Aug 26, 2025
Method for producing support substrate for bonded wafer, and support substrate for bonded wafer
SUMCO CORP0 citations49
US12527054B2Jan 13, 2026
Silicon wafer and epitaxial silicon wafer
SUMCO CORP0 citations47
US10867791B2Dec 15, 2020
Method for manufacturing epitaxial silicon wafer and epitaxial silicon wafer
SUMCO CORP0 citations44