Inventor

WORMINGTON MATTHEW

US26 patents

⚠️ This page may combine multiple inventors who share the name “WORMINGTON MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WORMINGTON MATTHEW

BRUKER JV ISRAEL LTD

X-ray detection optics for small-angle X-ray scatterometry

X-ray fluorescence apparatus for contamination monitoring

Image contrast in X-ray topography imaging for defect inspection

X-ray source optics for small-angle X-ray scatterometry

Closed-loop control of X-ray knife edge

Wafer alignment for small-angle x-ray scatterometry

BRUKER TECH LTD

Small-angle x-ray scatterometry

Small-angle X-ray scatterometry

Small-angle x-ray scatterometry

Navigation accuracy using camera coupled with detector assembly

Analysis of x-ray scatterometry data using deep learning

Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structures

JORDAN VALLEY SEMICONDUCTORS LTD

Measurement of small features using XRF

X-ray scatterometry apparatus

Using multiple sources/detectors for high-throughput X-ray topography measurement

X-ray source assembly

WORMINGTON MATTHEW

Enhancing accuracy of fast high-resolution X-ray diffractometry

Detection of wafer-edge defects

YOKHIN BORIS

High-resolution X-ray diffraction measurement with enhanced sensitivity

High-resolution X-ray diffraction measurement with enhanced sensitivity

JORDAN VALLEY SEMICONDUCTORS

Estimation of XRF intensity from an array of micro-bumps

X-ray inspection of bumps on a semiconductor substrate

BEDE SCIENT INC

Fitting of X-ray scattering data using evolutionary algorithms

WALL JOHN

Fast measurement of X-ray diffraction from tilted layers

BEDE SCIENT INSTR LTD

X-ray topographic system

MAZOR ISAAC

Combining X-ray and VUV analysis of thin film layers