Inventor
COMENDANT KEITH
US45 patents
⚠️ This page may combine multiple inventors who share the name “COMENDANT KEITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
32 patentsUS7651269B2Jan 26, 2010
Temperature probes having a thermally isolated tip
LAM RES CORP498 citations99
US8884194B2Nov 11, 2014
Heating plate with planar heater zones for semiconductor processing
LAM RES CORP52 citations98
US10056225B2Aug 21, 2018
Adjusting substrate temperature to improve CD uniformity
LAM RES CORP36 citations94
US8587113B2Nov 19, 2013
Thermal plate with planar thermal zones for semiconductor processing
LAM RES CORP40 citations94
US9392643B2Jul 12, 2016
Heating plate with planar heater zones for semiconductor processing
LAM RES CORP12 citations92
US8038796B2Oct 18, 2011
Apparatus for spatial and temporal control of temperature on a substrate
LAM RES CORP21 citations92
US7875824B2Jan 25, 2011
Quartz guard ring centering features
LAM RES CORP16 citations92
US7223321B1May 29, 2007
Faraday shield disposed within an inductively coupled plasma etching apparatus
LAM RES CORP40 citations92
US7854820B2Dec 21, 2010
Upper electrode backing member with particle reducing features
LAM RES CORP38 citations91
US7431788B2Oct 7, 2008
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
LAM RES CORP36 citations90
US10720346B2Jul 21, 2020
Substrate support with thermal zones for semiconductor processing
LAM RES CORP5 citations84
US10236193B2Mar 19, 2019
Substrate supports with multi-layer structure including independent operated heater zones
LAM RES CORP6 citations84
US9646861B2May 9, 2017
Heating plate with heating zones for substrate processing and method of use thereof
LAM RES CORP7 citations84
US7939784B2May 10, 2011
Electrostatic chuck support assembly
LAM RES CORP8 citations84
US7501605B2Mar 10, 2009
Method of tuning thermal conductivity of electrostatic chuck support assembly
LAM RES CORP12 citations84
US10049948B2Aug 14, 2018
Power switching system for ESC with array of thermal control elements
LAM RES CORP14 citations83
US8735298B2May 27, 2014
Method for spatial and temporal control of temperature on a substrate
LAM RES CORP4 citations83
US7780791B2Aug 24, 2010
Apparatus for an optimized plasma chamber top piece
LAM RES CORP8 citations83
US8051556B2Nov 8, 2011
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate
LAM RES CORP4 citations73
US10002782B2Jun 19, 2018
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
LAM RES CORP3 citations69
US7998296B2Aug 16, 2011
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
LAM RES CORP6 citations66
US12237201B2Feb 25, 2025
Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns
LAM RES CORP0 citations62
US11302556B2Apr 12, 2022
Apparatus for spatial and temporal control of temperature on a substrate
LAM RES CORP0 citations62
US10770363B2Sep 8, 2020
Power switching system for ESC with array of thermal control elements
LAM RES CORP1 citations62
US7973539B1Jul 5, 2011
Methods for measuring dielectric properties of parts
LAM RES CORP3 citations62
US7777500B2Aug 17, 2010
Methods for characterizing dielectric properties of parts
LAM RES CORP2 citations62
US12340989B2Jun 24, 2025
Electrostatic edge ring mounting system for substrate processing
LAM RES CORP0 citations59
US10804129B2Oct 13, 2020
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
LAM RES CORP0 citations52
US10636689B2Apr 28, 2020
Apparatus for spatial and temporal control of temperature on a substrate
LAM RES CORP0 citations51
US9322795B2Apr 26, 2016
Electrode for use in measuring dielectric properties of parts
LAM RES CORP0 citations51
US9093483B2Jul 28, 2015
Showerhead electrode assembly with gas flow modification for extended electrode life
LAM RES CORP0 citations51
US7911213B2Mar 22, 2011
Methods for measuring dielectric properties of parts
LAM RES CORP0 citations51
GAFF KEITH WILLIAM
3 patentsUS8624168B2Jan 7, 2014
Heating plate with diode planar heater zones for semiconductor processing
GAFF KEITH WILLIAM57 citations97
US8461674B2Jun 11, 2013
Thermal plate with planar thermal zones for semiconductor processing
GAFF KEITH WILLIAM63 citations97
US8642480B2Feb 4, 2014
Adjusting substrate temperature to improve CD uniformity
GAFF KEITH WILLIAM22 citations92