Inventor
DAITO KAZUYA
US31 patents
Patents
31 patentsUS9169556B2Oct 27, 2015
Tungsten growth modulation by controlling surface composition
APPLIED MATERIALS INC9 citations82
US10793951B2Oct 6, 2020
Apparatus to improve substrate temperature uniformity
APPLIED MATERIALS INC3 citations73
US9957615B2May 1, 2018
Apparatus to improve substrate temperature uniformity
APPLIED MATERIALS INC4 citations73
US9947578B2Apr 17, 2018
Methods for forming low-resistance contacts through integrated process flow systems
APPLIED MATERIALS INC2 citations72
US9653352B2May 16, 2017
Methods for forming metal organic tungsten for middle of the line (MOL) applications
APPLIED MATERIALS INC4 citations72
US11404313B2Aug 2, 2022
Selective tungsten deposition at low temperatures
APPLIED MATERIALS INC2 citations71
US12379280B2Aug 5, 2025
Method of measuring efficiency for optical devices
APPLIED MATERIALS INC0 citations62
US12236575B2Feb 25, 2025
In-line metrology systems, apparatus, and methods for optical devices
APPLIED MATERIALS INC0 citations62
US12229940B2Feb 18, 2025
In-line metrology systems, apparatus, and methods for optical devices
APPLIED MATERIALS INC0 citations62
US12230479B2Feb 18, 2025
Processing chamber with multiple plasma units
APPLIED MATERIALS INC0 citations62
US11978196B2May 7, 2024
See-through metrology systems, apparatus, and methods for optical devices
APPLIED MATERIALS INC0 citations62
US11955319B2Apr 9, 2024
Processing chamber with multiple plasma units
APPLIED MATERIALS INC0 citations62
US11748875B2Sep 5, 2023
See-through metrology systems, apparatus, and methods for optical devices
APPLIED MATERIALS INC0 citations62
US11421322B2Aug 23, 2022
Blocker plate for use in a substrate process chamber
APPLIED MATERIALS INC0 citations62
US11062900B2Jul 13, 2021
Method of reducing effective oxide thickness in a semiconductor structure
APPLIED MATERIALS INC1 citations62
US10508339B2Dec 17, 2019
Blocker plate for use in a substrate process chamber
APPLIED MATERIALS INC1 citations62
US11967525B2Apr 23, 2024
Selective tungsten deposition at low temperatures
APPLIED MATERIALS INC0 citations61
US11515200B2Nov 29, 2022
Selective tungsten deposition within trench structures
APPLIED MATERIALS INC0 citations61
US11355391B2Jun 7, 2022
Method for forming a metal gapfill
APPLIED MATERIALS INC0 citations60
US11955381B2Apr 9, 2024
Low-temperature plasma pre-clean for selective gap fill
APPLIED MATERIALS INC0 citations59
US11807008B2Nov 7, 2023
Multifunctional printhead service station with multi-axis motions
APPLIED MATERIALS INC0 citations59
US10620031B2Apr 14, 2020
System for measuring level of a precursor in a container
APPLIED MATERIALS INC1 citations58
US11878532B2Jan 23, 2024
Inkjet platform for fabrication of optical films and structures
APPLIED MATERIALS INC0 citations57
US12152302B2Nov 26, 2024
Multiple-channel showerhead design and methods in manufacturing
APPLIED MATERIALS INC0 citations52
US11988574B2May 21, 2024
Illumination system for AR metrology tool
APPLIED MATERIALS INC0 citations52
US11802791B2Oct 31, 2023
Optical device metrology systems and related methods
APPLIED MATERIALS INC0 citations52
US11721542B2Aug 8, 2023
Dual plasma pre-clean for selective gap fill
APPLIED MATERIALS INC0 citations52
US11598003B2Mar 7, 2023
Substrate processing chamber having heated showerhead assembly
APPLIED MATERIALS INC0 citations52
US10535527B2Jan 14, 2020
Methods for depositing semiconductor films
APPLIED MATERIALS INC0 citations52
US9162930B2Oct 20, 2015
PVD ALN film with oxygen doping for a low etch rate hardmask film
APPLIED MATERIALS INC0 citations51
US11884076B2Jan 30, 2024
Fluid management system for inkjet machines
APPLIED MATERIALS INC0 citations49