Inventor
AZAD A N M WASEKUL
US9 patents
Patents
9 patentsUS12469680B2Nov 11, 2025
Radio-frequency (RF) matching network for fast impedance tuning
APPLIED MATERIALS INC1 citations63
US12368020B2Jul 22, 2025
Pulsed voltage source for plasma processing applications
APPLIED MATERIALS INC1 citations63
US12293897B2May 6, 2025
Radio frequency diverter assembly enabling on-demand different spatial
APPLIED MATERIALS INC1 citations63
US12111341B2Oct 8, 2024
In-situ electric field detection method and apparatus
APPLIED MATERIALS INC1 citations61
US11972924B2Apr 30, 2024
Pulsed voltage source for plasma processing applications
APPLIED MATERIALS INC0 citations61
US12586761B2Mar 24, 2026
Fast tuning radio frequency (RF) matching network
APPLIED MATERIALS INC0 citations51
US12334304B2Jun 17, 2025
System and methods for implementing a micro pulsing scheme using dual independent pulsers
APPLIED MATERIALS INC0 citations51
US12266506B2Apr 1, 2025
Scanning impedance measurement in a radio frequency plasma processing chamber
APPLIED MATERIALS INC0 citations51
US12205797B2Jan 21, 2025
Solid-state switch based high-speed pulser with plasma IEDF modification capability through multilevel output functionality
APPLIED MATERIALS INC0 citations51