Inventor
JANOS ALAN C
US12 patents
⚠️ This page may combine multiple inventors who share the name “JANOS ALAN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
9 patentsUS6597003B2Jul 22, 2003
Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers
AXCELIS TECH INC20 citations91
US6664737B1Dec 16, 2003
Dielectric barrier discharge apparatus and process for treating a substrate
AXCELIS TECH INC51 citations90
US6585908B2Jul 1, 2003
Shallow angle interference process and apparatus for determining real-time etching rate
AXCELIS TECH INC17 citations81
US6547458B1Apr 15, 2003
Optimized optical system design for endpoint detection
AXCELIS TECH INC16 citations81
US7709814B2May 4, 2010
Apparatus and process for treating dielectric materials
AXCELIS TECH INC12 citations80
US6605484B2Aug 12, 2003
Process for optically erasing charge buildup during fabrication of an integrated circuit
AXCELIS TECH INC9 citations70
US6897615B2May 24, 2005
Plasma process and apparatus
AXCELIS TECH INC4 citations62
US6987269B2Jan 17, 2006
Apparatus and process for measuring light intensities
AXCELIS TECH INC3 citations53
US6803319B2Oct 12, 2004
Process for optically erasing charge buildup during fabrication of an integrated circuit
AXCELIS TECH INC0 citations49