Inventor
PATZ ULRICH
DE8 patents
⚠️ This page may combine multiple inventors who share the name “PATZ ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEYBOLD AG
6 patentsUS4931169AJun 5, 1990
Apparatus for coating a substrate with dielectrics
LEYBOLD AG85 citations95
US5275709AJan 4, 1994
Apparatus for coating substrates, preferably flat, more or less plate-like substrates
LEYBOLD AG72 citations94
US5698039ADec 16, 1997
Process for cleaning a substrate using a barrier discharge
LEYBOLD AG25 citations92
US5182003AJan 26, 1993
Stationary magnetron sputtering cathode for a vacuum coating apparatus
LEYBOLD AG41 citations91
US5292419AMar 8, 1994
Sputtering unit
LEYBOLD AG35 citations89
US5372693ADec 13, 1994
Vacuum coating apparatus
LEYBOLD AG8 citations73