Inventor
GHANAYEM STEVE G
US20 patents
Patents
20 patentsUS5552016ASep 3, 1996
Method and apparatus for etchback endpoint detection
APPLIED MATERIALS INC130 citations98
US6638810B2Oct 28, 2003
Tantalum nitride CVD deposition by tantalum oxide densification
APPLIED MATERIALS INC324 citations97
US6464795B1Oct 15, 2002
Substrate support member for a processing chamber
APPLIED MATERIALS INC98 citations97
US6162715ADec 19, 2000
Method of forming gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride
APPLIED MATERIALS INC136 citations97
US7601652B2Oct 13, 2009
Method for treating substrates and films with photoexcitation
APPLIED MATERIALS INC486 citations96
US6319766B1Nov 20, 2001
Method of tantalum nitride deposition by tantalum oxide densification
APPLIED MATERIALS INC91 citations96
US6251190B1Jun 26, 2001
Gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride
APPLIED MATERIALS INC84 citations96
US5292554AMar 8, 1994
Deposition apparatus using a perforated pumping plate
APPLIED MATERIALS INC81 citations96
US6106634AAug 22, 2000
Methods and apparatus for reducing particle contamination during wafer transport
APPLIED MATERIALS INC83 citations95
US9601339B2Mar 21, 2017
Methods for depositing fluorine/carbon-free conformal tungsten
APPLIED MATERIALS INC13 citations92
US9230815B2Jan 5, 2016
Methods for depositing fluorine/carbon-free conformal tungsten
APPLIED MATERIALS INC17 citations92
US7377002B2May 27, 2008
Scrubber box
APPLIED MATERIALS INC20 citations92
US6192601B1Feb 27, 2001
Method and apparatus for reducing particle contamination during wafer transport
APPLIED MATERIALS INC26 citations92
US6303480B1Oct 16, 2001
Silicon layer to improve plug filling by CVD
APPLIED MATERIALS INC20 citations91
US7774887B2Aug 17, 2010
Scrubber box and methods for using the same
APPLIED MATERIALS INC6 citations73
US5777245AJul 7, 1998
Particle dispersing system and method for testing semiconductor manufacturing equipment
APPLIED MATERIALS INC9 citations70
US11887855B2Jan 30, 2024
Methods for depositing fluorine/carbon-free conformal tungsten
APPLIED MATERIALS INC0 citations62
US10985023B2Apr 20, 2021
Methods for depositing fluorine/carbon-free conformal tungsten
APPLIED MATERIALS INC0 citations62
US10429747B2Oct 1, 2019
Hybrid laser and implant treatment for overlay error correction
APPLIED MATERIALS INC0 citations51
US6602770B2Aug 5, 2003
Silicon layer to improve plug filling by CVD
APPLIED MATERIALS INC0 citations50