Inventor
BARTHA JOHANN W
DE9 patents
Patents
9 patentsUS5116462AMay 26, 1992
Method of producing micromechanical sensors for the afm/stm profilometry
IBM65 citations96
US4918033AApr 17, 1990
PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides
IBM84 citations96
US6218264B1Apr 17, 2001
Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range
IBM17 citations92
US5960255ASep 28, 1999
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM29 citations92
US5665905ASep 9, 1997
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM25 citations92
US5534359AJul 9, 1996
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM21 citations92
US5162133ANov 10, 1992
Process for fabricating silicon carbide films with a predetermined stress
IBM22 citations92
US4871418AOct 3, 1989
Process for fabricating arbitrarily shaped through holes in a component
IBM48 citations91
US4969415ANov 13, 1990
PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides
IBM12 citations74