Inventor
NONNENMACHER MARTIN
DE7 patents
Patents
7 patentsUS5646339AJul 8, 1997
Force microscope and method for measuring atomic forces in multiple directions
IBM57 citations96
US5283437AFeb 1, 1994
Pneumatically and electrostatically driven scanning tunneling microscope
IBM81 citations95
US6218264B1Apr 17, 2001
Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range
IBM17 citations92
US5960255ASep 28, 1999
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM29 citations92
US5665905ASep 9, 1997
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM25 citations92
US5534359AJul 9, 1996
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM21 citations92
US5280341AJan 18, 1994
Feedback controlled differential fiber interferometer
IBM36 citations92