Inventor
WEISS HELGA
DE11 patents
Patents
11 patentsUS5578745ANov 26, 1996
Calibration standards for profilometers and methods of producing them
IBM63 citations96
US5116462AMay 26, 1992
Method of producing micromechanical sensors for the afm/stm profilometry
IBM65 citations96
US5051379ASep 24, 1991
Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head
IBM71 citations96
US6218264B1Apr 17, 2001
Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range
IBM17 citations92
US6091124AJul 18, 2000
Micromechanical sensor for AFM/STM profilometry
IBM24 citations92
US5960255ASep 28, 1999
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM29 citations92
US5665905ASep 9, 1997
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM25 citations92
US5534359AJul 9, 1996
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
IBM21 citations92
US5382795AJan 17, 1995
Ultrafine silicon tips for AFM/STM profilometry
IBM41 citations92
US5242541ASep 7, 1993
Method of producing ultrafine silicon tips for the afm/stm profilometry
IBM39 citations92
US6088320AJul 11, 2000
Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft
IBM10 citations74