Inventor

JANSSEN HENRICUS W A

NL4 patents

⚠️ This page may combine multiple inventors who share the name “JANSSEN HENRICUS W A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PHILIPS CORP

3 patents

US5815246ASep 29, 1998

Two-dimensionally balanced positioning device, and lithographic device provided with such a positioning device

PHILIPS CORP170 citations96

US5204712AApr 20, 1993

Support device with a tiltable object table, and optical lithographic device provided with such a support device

PHILIPS CORP68 citations92

US5953105ASep 14, 1999

Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device

PHILIPS CORP48 citations89

ASM LITHOGRAPHY BV

1 patent

US6337484B1Jan 8, 2002

Positioning device and lithographic projection apparatus comprising such a device

ASM LITHOGRAPHY BV91 citations95