Inventor
HALPIN MICHAEL W
US31 patents
⚠️ This page may combine multiple inventors who share the name “HALPIN MICHAEL W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
27 patentsUS6143079ANov 7, 2000
Compact process chamber for improved process uniformity
ASM INC457 citations99
US6692576B2Feb 17, 2004
Wafer support system
ASM INC552 citations98
US6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6093252AJul 25, 2000
Process chamber with inner support
ASM INC638 citations98
US6053982AApr 25, 2000
Wafer support system
ASM INC690 citations98
US6293749B1Sep 25, 2001
Substrate transfer system for semiconductor processing equipment
ASM INC95 citations97
US6203622B1Mar 20, 2001
Wafer support system
ASM INC85 citations97
US6454863B1Sep 24, 2002
Compact process chamber for improved process uniformity
ASM INC40 citations96
US6491757B2Dec 10, 2002
Wafer support system
ASM INC42 citations95
US6454866B1Sep 24, 2002
Wafer support system
ASM INC38 citations95
US6021152AFeb 1, 2000
Reflective surface for CVD reactor walls
ASM INC59 citations94
US7166165B2Jan 23, 2007
Barrier coating for vitreous materials
ASM INC21 citations92
US6869485B2Mar 22, 2005
Compact process chamber for improved process uniformity
ASM INC22 citations92
US6608287B2Aug 19, 2003
Process chamber with rectangular temperature compensation ring
ASM INC34 citations92
US6572924B1Jun 3, 2003
Exhaust system for vapor deposition reactor and method of using the same
ASM INC36 citations92
US6465761B2Oct 15, 2002
Heat lamps for zone heating
ASM INC34 citations92
US6319556B1Nov 20, 2001
Reflective surface for CVD reactor walls
ASM INC26 citations90
US7169234B2Jan 30, 2007
Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder
ASM INC27 citations88
US6980734B2Dec 27, 2005
Lamp filament design
ASM INC5 citations74
US6976586B2Dec 20, 2005
Delicate product packaging system
ASM INC9 citations74
US6856078B2Feb 15, 2005
Lamp filament design
ASM INC7 citations74
US7655093B2Feb 2, 2010
Wafer support system
ASM INC4 citations73
US6929299B2Aug 16, 2005
Bonded structures for use in semiconductor processing environments
ASM INC6 citations63
US6781291B2Aug 24, 2004
Filament support for lamp
ASM INC4 citations63
US7186298B2Mar 6, 2007
Wafer support system
ASM INC2 citations62
US10480095B2Nov 19, 2019
System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow
ASM INC0 citations51