Inventor
WENGERT JOHN F
US13 patents
Patents
13 patentsUS6692576B2Feb 17, 2004
Wafer support system
ASM INC552 citations98
US6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6093252AJul 25, 2000
Process chamber with inner support
ASM INC638 citations98
US6053982AApr 25, 2000
Wafer support system
ASM INC690 citations98
US6203622B1Mar 20, 2001
Wafer support system
ASM INC85 citations97
US6086680AJul 11, 2000
Low-mass susceptor
ASM INC88 citations97
US6325858B1Dec 4, 2001
Long life high temperature process chamber
ASM INC596 citations96
US6491757B2Dec 10, 2002
Wafer support system
ASM INC42 citations95
US6454866B1Sep 24, 2002
Wafer support system
ASM INC38 citations95
US6464792B1Oct 15, 2002
Process chamber with downstream getter plate
ASM INC15 citations86
US7655093B2Feb 2, 2010
Wafer support system
ASM INC4 citations73
US7186298B2Mar 6, 2007
Wafer support system
ASM INC2 citations62