Inventor
VAN DER JEUGD CORNELIUS A
US21 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER JEUGD CORNELIUS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
12 patentsUS6692576B2Feb 17, 2004
Wafer support system
ASM INC552 citations98
US6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6093252AJul 25, 2000
Process chamber with inner support
ASM INC638 citations98
US6053982AApr 25, 2000
Wafer support system
ASM INC690 citations98
US6203622B1Mar 20, 2001
Wafer support system
ASM INC85 citations97
US6086680AJul 11, 2000
Low-mass susceptor
ASM INC88 citations97
US6491757B2Dec 10, 2002
Wafer support system
ASM INC42 citations95
US6454866B1Sep 24, 2002
Wafer support system
ASM INC38 citations95
US7629270B2Dec 8, 2009
Remote plasma activated nitridation
ASM INC11 citations80
US7655093B2Feb 2, 2010
Wafer support system
ASM INC4 citations73
US7186298B2Mar 6, 2007
Wafer support system
ASM INC2 citations62
ASM IP HOLDING BV
5 patentsUS9552979B2Jan 24, 2017
Cyclic aluminum nitride deposition in a batch reactor
ASM IP HOLDING BV43 citations92
US10343907B2Jul 9, 2019
Method and system for delivering hydrogen peroxide to a semiconductor processing chamber
ASM IP HOLDING BV3 citations72
US9837271B2Dec 5, 2017
Process for forming silicon-filled openings with a reduced occurrence of voids
ASM IP HOLDING BV2 citations72
US9443730B2Sep 13, 2016
Process for forming silicon-filled openings with a reduced occurrence of voids
ASM IP HOLDING BV1 citations51
US9431238B2Aug 30, 2016
Reactive curing process for semiconductor substrates
ASM IP HOLDING BV1 citations51
ASM INT
3 patentsUS7294582B2Nov 13, 2007
Low temperature silicon compound deposition
ASM INT116 citations95
US7153772B2Dec 26, 2006
Methods of forming silicide films in semiconductor devices
ASM INT27 citations92
US7691750B2Apr 6, 2010
Methods of forming films in semiconductor devices with solid state reactants
ASM INT13 citations83