Inventor
JACOBS LOREN R
US14 patents
Patents
14 patentsUS6692576B2Feb 17, 2004
Wafer support system
ASM INC552 citations98
US6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6093252AJul 25, 2000
Process chamber with inner support
ASM INC638 citations98
US6053982AApr 25, 2000
Wafer support system
ASM INC690 citations98
US6293749B1Sep 25, 2001
Substrate transfer system for semiconductor processing equipment
ASM INC95 citations97
US6203622B1Mar 20, 2001
Wafer support system
ASM INC85 citations97
US6893507B2May 17, 2005
Self-centering wafer support system
ASM INC75 citations95
US6491757B2Dec 10, 2002
Wafer support system
ASM INC42 citations95
US6454866B1Sep 24, 2002
Wafer support system
ASM INC38 citations95
US6454865B1Sep 24, 2002
Low mass wafer support system
ASM INC82 citations95
US7169234B2Jan 30, 2007
Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder
ASM INC27 citations88
US7655093B2Feb 2, 2010
Wafer support system
ASM INC4 citations73
US7186298B2Mar 6, 2007
Wafer support system
ASM INC2 citations62