Inventor
VAN BILSEN FRANK B M
US8 patents
Patents
8 patentsUS6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6191399B1Feb 20, 2001
System of controlling the temperature of a processing chamber
ASM INC527 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6491757B2Dec 10, 2002
Wafer support system
ASM INC42 citations95
US6454866B1Sep 24, 2002
Wafer support system
ASM INC38 citations95
US6703592B2Mar 9, 2004
System of controlling the temperature of a processing chamber
ASM INC24 citations92
US6507007B2Jan 14, 2003
System of controlling the temperature of a processing chamber
ASM INC29 citations92
US7655093B2Feb 2, 2010
Wafer support system
ASM INC4 citations73