Inventor
GOODMAN MATTHEW
US11 patents
⚠️ This page may combine multiple inventors who share the name “GOODMAN MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
5 patentsUS6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6491757B2Dec 10, 2002
Wafer support system
ASM INC42 citations95
US6454866B1Sep 24, 2002
Wafer support system
ASM INC38 citations95
US7655093B2Feb 2, 2010
Wafer support system
ASM INC4 citations73
ASM IP HOLDING BV
3 patentsUS10446393B2Oct 15, 2019
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
ASM IP HOLDING BV4 citations71
US11594444B2Feb 28, 2023
Susceptor with sidewall humps for uniform deposition
ASM IP HOLDING BV0 citations50
US12394659B2Aug 19, 2025
Susceptors with film deposition control features
ASM IP HOLDING BV0 citations48