Inventor
GLENN HARTMANN
US5 patents
Patents
5 patentsUS6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6491757B2Dec 10, 2002
Wafer support system
ASM INC42 citations95
US6454866B1Sep 24, 2002
Wafer support system
ASM INC38 citations95
US7655093B2Feb 2, 2010
Wafer support system
ASM INC4 citations73