Inventor
YOKOYAMA TETSUROU
JP2 patents
Patents
2 patentsUS6624094B2Sep 23, 2003
Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms
OKI ELECTRIC IND CO LTD4 citations56
US7026257B2Apr 11, 2006
Method of manufacturing low dielectric film by a vacuum ultraviolet chemical vapor deposition
OKI ELECTRIC IND CO LTD0 citations45