Inventor
SHENDON NORMAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “SHENDON NORMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6024630AFeb 15, 2000
Fluid-pressure regulated wafer polishing head
APPLIED MATERIALS INC249 citations98
US7614939B2Nov 10, 2009
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
APPLIED MATERIALS INC39 citations96
US6716094B2Apr 6, 2004
Chemical mechanical polishing retaining ring
APPLIED MATERIALS INC31 citations96
US6290577B1Sep 18, 2001
Fluid pressure regulated wafer polishing head
APPLIED MATERIALS INC31 citations96
US5775983AJul 7, 1998
Apparatus and method for conditioning a chemical mechanical polishing pad
APPLIED MATERIALS INC82 citations94
US6443824B2Sep 3, 2002
Fluid-pressure regulated wafer polishing head
APPLIED MATERIALS INC25 citations92
US6120608ASep 19, 2000
Workpiece support platen for semiconductor process chamber
APPLIED MATERIALS INC22 citations92
US6513848B1Feb 4, 2003
Hydraulically actuated wafer clamp
APPLIED MATERIALS INC32 citations87
US6652368B2Nov 25, 2003
Chemical mechanical polishing carrier head
APPLIED MATERIALS INC12 citations82
US7101261B2Sep 5, 2006
Fluid-pressure regulated wafer polishing head
APPLIED MATERIALS INC4 citations73