Inventor
DELANEY LAURENCE D
US7 patents
Patents
7 patentsUS6450346B1Sep 17, 2002
Silicon fixtures for supporting wafers during thermal processing
INTEGRATED MATERIALS INC68 citations95
US6617225B2Sep 9, 2003
Method of machining silicon
INTEGRATED MATERIALS INC15 citations92
US6455395B1Sep 24, 2002
Method of fabricating silicon structures including fixtures for supporting wafers
INTEGRATED MATERIALS INC39 citations92
US6979659B2Dec 27, 2005
Silicon fixture supporting silicon wafers during high temperature processing
INTEGRATED MATERIALS INC13 citations83
US6727191B2Apr 27, 2004
High temperature hydrogen anneal of silicon wafers supported on a silicon fixture
INTEGRATED MATERIALS INC12 citations72
US7074693B2Jul 11, 2006
Plasma spraying for joining silicon parts
INTEGRATED MATERIALS INC4 citations61
US7736747B2Jun 15, 2010
Silicon parts joined by a silicon layer preferably plasma sprayed
INTEGRATED MATERIALS INC1 citations51