P

Inventor

WAKABAYASHI SHINJI

JP36 patents
⚠️ This page may combine multiple inventors who share the name “WAKABAYASHI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

15 patents
US8025475B2Sep 27, 2011

Wafer transfer apparatus, wafer transfer method and storage medium

TOKYO ELECTRON LTD12 citations84
US11688619B2Jun 27, 2023

Vacuum processing apparatus and substrate transfer method

TOKYO ELECTRON LTD6 citations75
US11404299B2Aug 2, 2022

Substrate transfer mechanism, substrate processing apparatus, and substrate processing method

TOKYO ELECTRON LTD2 citations73
US10431481B2Oct 1, 2019

Load lock apparatus and substrate processing system

TOKYO ELECTRON LTD6 citations73
US9929030B2Mar 27, 2018

Substrate processing device and substrate transfer method

TOKYO ELECTRON LTD2 citations73
US9887115B2Feb 6, 2018

Substrate processing apparatus, cover opening and closing mechanism,shielding mechanism, and method for purging container

TOKYO ELECTRON LTD3 citations73
US10229847B2Mar 12, 2019

Substrate transfer chamber and container connecting mechanism with lid opening mechanisms

TOKYO ELECTRON LTD2 citations72
US9732881B2Aug 15, 2017

Gate valve and substrate processing system

TOKYO ELECTRON LTD2 citations72
US8021513B2Sep 20, 2011

Substrate carrying apparatus and substrate carrying method

TOKYO ELECTRON LTD2 citations63
US11335586B2May 17, 2022

Transfer device

TOKYO ELECTRON LTD0 citations62
US10906756B2Feb 2, 2021

Substrate processing device

TOKYO ELECTRON LTD1 citations62
US12461212B2Nov 4, 2025

Substrate processing system and method of estimating height of annular member

TOKYO ELECTRON LTD0 citations46
US10403529B2Sep 3, 2019

Carrier transport device and carrier transport method

TOKYO ELECTRON LTD0 citations42
US9962840B2May 8, 2018

Substrate conveyance apparatus

TOKYO ELECTRON LTD0 citations42
US10429543B2Oct 1, 2019

Substrate detection apparatus, substrate detection method and substrate processing system

TOKYO ELECTRON LTD0 citations41

WAKABAYASHI SHINJI

8 patents

DENSO CORP

4 patents

DIESEL KIKI CO

3 patents

ALPINE ELECTRONICS INC

3 patents

TOYOTA MOTOR CO LTD

1 patent

KIMURA MASARU

1 patent

KOHNO SHIGERU

1 patent