Inventor
WAKABAYASHI SHINJI
JP36 patents
⚠️ This page may combine multiple inventors who share the name “WAKABAYASHI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
15 patentsUS8025475B2Sep 27, 2011
Wafer transfer apparatus, wafer transfer method and storage medium
TOKYO ELECTRON LTD12 citations84
US11688619B2Jun 27, 2023
Vacuum processing apparatus and substrate transfer method
TOKYO ELECTRON LTD6 citations75
US11404299B2Aug 2, 2022
Substrate transfer mechanism, substrate processing apparatus, and substrate processing method
TOKYO ELECTRON LTD2 citations73
US10431481B2Oct 1, 2019
Load lock apparatus and substrate processing system
TOKYO ELECTRON LTD6 citations73
US9929030B2Mar 27, 2018
Substrate processing device and substrate transfer method
TOKYO ELECTRON LTD2 citations73
US9887115B2Feb 6, 2018
Substrate processing apparatus, cover opening and closing mechanism,shielding mechanism, and method for purging container
TOKYO ELECTRON LTD3 citations73
US10229847B2Mar 12, 2019
Substrate transfer chamber and container connecting mechanism with lid opening mechanisms
TOKYO ELECTRON LTD2 citations72
US9732881B2Aug 15, 2017
Gate valve and substrate processing system
TOKYO ELECTRON LTD2 citations72
US8021513B2Sep 20, 2011
Substrate carrying apparatus and substrate carrying method
TOKYO ELECTRON LTD2 citations63
US11335586B2May 17, 2022
Transfer device
TOKYO ELECTRON LTD0 citations62
US10906756B2Feb 2, 2021
Substrate processing device
TOKYO ELECTRON LTD1 citations62
US12461212B2Nov 4, 2025
Substrate processing system and method of estimating height of annular member
TOKYO ELECTRON LTD0 citations46
US10403529B2Sep 3, 2019
Carrier transport device and carrier transport method
TOKYO ELECTRON LTD0 citations42
US9962840B2May 8, 2018
Substrate conveyance apparatus
TOKYO ELECTRON LTD0 citations42
US10429543B2Oct 1, 2019
Substrate detection apparatus, substrate detection method and substrate processing system
TOKYO ELECTRON LTD0 citations41
WAKABAYASHI SHINJI
8 patentsUS9443749B2Sep 13, 2016
Vacuum processing apparatus
WAKABAYASHI SHINJI142 citations96
US8123456B2Feb 28, 2012
Container changing system and container changing method
WAKABAYASHI SHINJI11 citations83
US9330950B2May 3, 2016
Substrate processing apparatus
WAKABAYASHI SHINJI2 citations62
US8999103B2Apr 7, 2015
Substrate processing system, substrate processing method and storage medium
WAKABAYASHI SHINJI2 citations62
US9096395B2Aug 4, 2015
Electric actuator
WAKABAYASHI SHINJI0 citations51
US8230728B2Jul 31, 2012
Alcohol concentration sensor disposed in fuel tank of automotive vehicle
WAKABAYASHI SHINJI1 citations49
US9389607B2Jul 12, 2016
Method for setting substrate-treatment time, and storage medium
WAKABAYASHI SHINJI0 citations41
US9269599B2Feb 23, 2016
Substrate relay apparatus, substrate relay method, and substrate processing apparatus
WAKABAYASHI SHINJI0 citations41
DENSO CORP
4 patentsUS7221157B2May 22, 2007
Magnetic sensor apparatus and manufacturing method thereof
DENSO CORP17 citations83
US6686992B2Feb 3, 2004
Raindrop detecting method and apparatus having temperature-dependent characteristic compensation
DENSO CORP7 citations72
US7487266B2Feb 3, 2009
Communication system and method, and distributed control system and method
DENSO CORP5 citations63
US7038459B2May 2, 2006
Oil deterioration detection apparatus
DENSO CORP5 citations63
DIESEL KIKI CO
3 patentsUS4523633AJun 18, 1985
Heater unit for automotive vehicles, permitting easy removal and fitting of heater core from and into casing
DIESEL KIKI CO18 citations74
US4892135AJan 9, 1990
Air conditioner for automobiles with hot/refrigeration compartment for stored articles
DIESEL KIKI CO8 citations72
US4834170AMay 30, 1989
Air conditioner for automobiles
DIESEL KIKI CO14 citations72
ALPINE ELECTRONICS INC
3 patentsUS7307935B2Dec 11, 2007
Recording and playback apparatus, music-data recording and playback method, and music-data recording and playback program
ALPINE ELECTRONICS INC7 citations70
US7113456B2Sep 26, 2006
Method and apparatus for playing back a multisession disc
ALPINE ELECTRONICS INC6 citations61
US7720988B2May 18, 2010
Method and apparatus for multimedia reproduction
ALPINE ELECTRONICS INC6 citations59