Inventor
TAN ZHENGQUAN
US22 patents
⚠️ This page may combine multiple inventors who share the name “TAN ZHENGQUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS6929700B2Aug 16, 2005
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
APPLIED MATERIALS INC482 citations98
US6596653B2Jul 22, 2003
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
APPLIED MATERIALS INC542 citations98
US6740601B2May 25, 2004
HDP-CVD deposition process for filling high aspect ratio gaps
APPLIED MATERIALS INC53 citations96
US6423384B1Jul 23, 2002
HDP-CVD deposition of low dielectric constant amorphous carbon film
APPLIED MATERIALS INC76 citations95
US7159597B2Jan 9, 2007
Multistep remote plasma clean process
APPLIED MATERIALS INC19 citations92
US6682603B2Jan 27, 2004
Substrate support with extended radio frequency electrode upper surface
APPLIED MATERIALS INC21 citations90
US6812153B2Nov 2, 2004
Method for high aspect ratio HDP CVD gapfill
APPLIED MATERIALS INC13 citations83
US6596123B1Jul 22, 2003
Method and apparatus for cleaning a semiconductor wafer processing system
APPLIED MATERIALS INC15 citations82
US7196021B2Mar 27, 2007
HDP-CVD deposition process for filling high aspect ratio gaps
APPLIED MATERIALS INC5 citations73
US6914016B2Jul 5, 2005
HDP-CVD deposition process for filling high aspect ratio gaps
APPLIED MATERIALS INC8 citations73
US6715496B2Apr 6, 2004
Method and apparatus for cleaning a semiconductor wafer processing system
APPLIED MATERIALS INC10 citations71
US7064077B2Jun 20, 2006
Method for high aspect ratio HDP CVD gapfill
APPLIED MATERIALS INC2 citations61
KLA TENCOR CORP
5 patentsUS10013518B2Jul 3, 2018
Model building and analysis engine for combined X-ray and optical metrology
KLA TENCOR CORP29 citations94
US11555689B2Jan 17, 2023
Measuring thin films on grating and bandgap on grating
KLA TENCOR CORP4 citations74
US10458912B2Oct 29, 2019
Model based optical measurements of semiconductor structures with anisotropic dielectric permittivity
KLA TENCOR CORP6 citations73
US11378451B2Jul 5, 2022
Bandgap measurements of patterned film stacks using spectroscopic metrology
KLA TENCOR CORP3 citations70
US10663286B2May 26, 2020
Measuring thin films on grating and bandgap on grating
KLA TENCOR CORP0 citations51
KLA CORP
4 patentsUS11573077B2Feb 7, 2023
Scatterometry based methods and systems for measurement of strain in semiconductor structures
KLA CORP4 citations73
US11060846B2Jul 13, 2021
Scatterometry based methods and systems for measurement of strain in semiconductor structures
KLA CORP0 citations61
US11796390B2Oct 24, 2023
Bandgap measurements of patterned film stacks using spectroscopic metrology
KLA CORP0 citations59
US12379672B2Aug 5, 2025
Metrology of nanosheet surface roughness and profile
KLA CORP0 citations42