Inventor
ZYGMUNT WALTER
US8 patents
Patents
8 patentsUS6929700B2Aug 16, 2005
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
APPLIED MATERIALS INC482 citations98
US6596653B2Jul 22, 2003
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
APPLIED MATERIALS INC542 citations98
US6740601B2May 25, 2004
HDP-CVD deposition process for filling high aspect ratio gaps
APPLIED MATERIALS INC53 citations96
US6200911B1Mar 13, 2001
Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps using differential plasma power
APPLIED MATERIALS INC57 citations95
US6579811B2Jun 17, 2003
Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating
APPLIED MATERIALS INC19 citations92
US7196021B2Mar 27, 2007
HDP-CVD deposition process for filling high aspect ratio gaps
APPLIED MATERIALS INC5 citations73
US6914016B2Jul 5, 2005
HDP-CVD deposition process for filling high aspect ratio gaps
APPLIED MATERIALS INC8 citations73
US7704897B2Apr 27, 2010
HDP-CVD SiON films for gap-fill
APPLIED MATERIALS INC7 citations68