Inventor
POLINSKY WILLIAM A
US6 patents
Patents
6 patentsUS6762125B1Jul 13, 2004
Modified facet etch to prevent blown gate oxide and increase etch chamber life
MICRON TECHNOLOGY INC13 citations78
US6727158B2Apr 27, 2004
Structure and method for forming a faceted opening and a layer filling therein
MICRON TECHNOLOGY INC15 citations76
US7846776B2Dec 7, 2010
Methods for releasably attaching sacrificial support members to microfeature workpieces and microfeature devices formed using such methods
MICRON TECHNOLOGY INC4 citations61
US7262136B2Aug 28, 2007
Modified facet etch to prevent blown gate oxide and increase etch chamber life
MICRON TECHNOLOGY INC2 citations57
US7273817B2Sep 25, 2007
Conditioning of a reaction chamber
MICRON TECHNOLOGY INC0 citations44
US7022620B2Apr 4, 2006
Conditioning of a reaction chamber
MICRON TECHNOLOGY INC0 citations44