Inventor
HARNED NOREEN
US3 patents
Patents
3 patentsUS7405802B2Jul 29, 2008
Large field of view 2X magnification projection optical system for FPD manufacture
ASML HOLDING NV1 citations56
US7420722B2Sep 2, 2008
Multiple illumination source exposure apparatus
ASML HOLDING NV0 citations46
US7342701B2Mar 11, 2008
Multiple illumination source exposure apparatus
ASML HOLDING NV0 citations46