Inventor
MONKOWSKI JOSEPH R
US24 patents
⚠️ This page may combine multiple inventors who share the name “MONKOWSKI JOSEPH R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PIVOTAL SYSTEMS CORP
8 patentsUS7823436B2Nov 2, 2010
Method and apparatus for in situ testing of gas flow controllers
PIVOTAL SYSTEMS CORP37 citations95
US7757541B1Jul 20, 2010
Techniques for calibration of gas flows
PIVOTAL SYSTEMS CORP23 citations92
US7695984B1Apr 13, 2010
Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processes
PIVOTAL SYSTEMS CORP8 citations84
US9983595B2May 29, 2018
Method and apparatus for gas flow control
PIVOTAL SYSTEMS CORP5 citations82
US9904297B2Feb 27, 2018
Method and apparatus for gas flow control
PIVOTAL SYSTEMS CORP6 citations82
US9523435B2Dec 20, 2016
Method and apparatus for gas flow control
PIVOTAL SYSTEMS CORP5 citations82
US10401202B2Sep 3, 2019
Method and apparatus for gas flow control
PIVOTAL SYSTEMS CORP8 citations78
US7940395B2May 10, 2011
Method and apparatus for identifying the chemical composition of a gas
PIVOTAL SYSTEMS CORP6 citations73
MONKOWSKI JOSEPH R
7 patentsUS8240324B2Aug 14, 2012
Method and apparatus for in situ testing of gas flow controllers
MONKOWSKI JOSEPH R29 citations91
US8857456B2Oct 14, 2014
Method and apparatus for in situ testing of gas flow controllers
MONKOWSKI JOSEPH R12 citations89
US8667830B2Mar 11, 2014
Method and apparatus for in situ testing of gas flow controllers
MONKOWSKI JOSEPH R9 citations83
US8393197B2Mar 12, 2013
Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing
MONKOWSKI JOSEPH R12 citations83
US8237928B2Aug 7, 2012
Method and apparatus for identifying the chemical composition of a gas
MONKOWSKI JOSEPH R7 citations83
US9400004B2Jul 26, 2016
Transient measurements of mass flow controllers
MONKOWSKI JOSEPH R16 citations82
US4415545ANov 15, 1983
Solid film growth via preferential etching of liquid solutions
MONKOWSKI JOSEPH R2 citations62
LAM RES CORP
3 patents(unassigned)
3 patentsUS5515238AMay 7, 1996
Thermoelectric module having reduced spacing between semiconductor elements
71 citations93
US5434744AJul 18, 1995
Thermoelectric module having reduced spacing between semiconductor elements
27 citations89
US5722158AMar 3, 1998
Method of manufacture and resulting thermoelectric module
15 citations70
CHUNG SHERK
3 patentsUS8271211B2Sep 18, 2012
Method and apparatus for enhancing in-situ gas flow measurement performance
CHUNG SHERK25 citations90
US8271210B2Sep 18, 2012
Method and apparatus for enhancing in-situ gas flow measurement performance
CHUNG SHERK23 citations90
US8265888B2Sep 11, 2012
Method and apparatus for enhancing in-situ gas flow measurement performance
CHUNG SHERK25 citations90