Inventor
AQUI DEREK G
US9 patents
⚠️ This page may combine multiple inventors who share the name “AQUI DEREK G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HIGH YIELD TECHNOLOGY
4 patentsUS5347138ASep 13, 1994
In situ real time particle monitor for a sputter coater chamber
HIGH YIELD TECHNOLOGY35 citations92
US5436465AJul 25, 1995
Modular particle monitor for vacuum process equipment
HIGH YIELD TECHNOLOGY31 citations89
US5606418AFeb 25, 1997
Quasi bright field particle sensor
HIGH YIELD TECHNOLOGY10 citations73
US5534706AJul 9, 1996
Particle monitor for throttled pumping systems
HIGH YIELD TECHNOLOGY17 citations68
ZUNIGA STEVEN M
4 patentsUS8151852B2Apr 10, 2012
Bonding apparatus and method
ZUNIGA STEVEN M5 citations60
US8334191B2Dec 18, 2012
Two-chamber system and method for serial bonding and exfoliation of multiple workpieces
ZUNIGA STEVEN M2 citations57
US8545660B1Oct 1, 2013
Bonding apparatus and method
ZUNIGA STEVEN M0 citations50
US8207047B2Jun 26, 2012
Apparatus and method for simultaneous treatment of multiple workpieces
ZUNIGA STEVEN M0 citations37