Inventor
UMOTOY SALVADOR
US10 patents
⚠️ This page may combine multiple inventors who share the name “UMOTOY SALVADOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6302965B1Oct 16, 2001
Dispersion plate for flowing vaporizes compounds used in chemical vapor deposition of films onto semiconductor surfaces
APPLIED MATERIALS INC209 citations99
US6589352B1Jul 8, 2003
Self aligning non contact shadow ring process kit
APPLIED MATERIALS INC566 citations98
US6379466B1Apr 30, 2002
Temperature controlled gas distribution plate
APPLIED MATERIALS INC468 citations97
US6375748B1Apr 23, 2002
Method and apparatus for preventing edge deposition
APPLIED MATERIALS INC293 citations96
US6079356AJun 27, 2000
Reactor optimized for chemical vapor deposition of titanium
APPLIED MATERIALS INC766 citations96
US6223447B1May 1, 2001
Fastening device for a purge ring
APPLIED MATERIALS INC50 citations90
US6521292B1Feb 18, 2003
Substrate support including purge ring having inner edge aligned to wafer edge
APPLIED MATERIALS INC46 citations89
US6503331B1Jan 7, 2003
Tungsten chamber with stationary heater
APPLIED MATERIALS INC18 citations84
US8342119B2Jan 1, 2013
Self aligning non contact shadow ring process kit
APPLIED MATERIALS INC11 citations83