Inventor
NGO TAI T
US9 patents
⚠️ This page may combine multiple inventors who share the name “NGO TAI T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6464795B1Oct 15, 2002
Substrate support member for a processing chamber
APPLIED MATERIALS INC98 citations97
US7779527B2Aug 24, 2010
Methods and apparatus for installing a scrubber brush on a mandrel
APPLIED MATERIALS INC13 citations80
US11230763B2Jan 25, 2022
Gas separation control in spatial atomic layer deposition
APPLIED MATERIALS INC2 citations72
US10570511B2Feb 25, 2020
Gas separation control in spatial atomic layer deposition
APPLIED MATERIALS INC2 citations72
US9721757B2Aug 1, 2017
Elongated capacitively coupled plasma source for high temperature low pressure environments
APPLIED MATERIALS INC3 citations72
US11821083B2Nov 21, 2023
Gas separation control in spatial atomic layer deposition
APPLIED MATERIALS INC0 citations62