Inventor
AOYAMA HISAKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “AOYAMA HISAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS5592024AJan 7, 1997
Semiconductor device having a wiring layer with a barrier layer
TOSHIBA KK133 citations98
US6794286B2Sep 21, 2004
Process for fabricating a metal wiring and metal contact in a semicondutor device
TOSHIBA KK55 citations96
US6090699AJul 18, 2000
Method of making a semiconductor device
TOSHIBA KK35 citations92
US6060368AMay 9, 2000
Mask pattern correction method
TOSHIBA KK11 citations73
US7075098B2Jul 11, 2006
Method of selecting pattern to be measured, pattern inspection method, manufacturing method of semiconductor device, program, and pattern inspection apparatus
TOSHIBA KK3 citations62
US7862965B2Jan 4, 2011
Method for detecting defects which originate from chemical solution and method of manufacturing semiconductor device
TOSHIBA KK0 citations51