Inventor
NAKANO TETSUHISA
JP4 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO TETSUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OHTSUKA KENICHI
3 patentsUS8885173B2Nov 11, 2014
Film thickness measurement device and film thickness measurement method
OHTSUKA KENICHI6 citations70
US8699023B2Apr 15, 2014
Reflectivity measuring device, reflectivity measuring method, membrane thickness measuring device, and membrane thickness measuring method
OHTSUKA KENICHI3 citations59
US8649023B2Feb 11, 2014
Film thickness measurement device and measurement method
OHTSUKA KENICHI1 citations49