P

Inventor

UEDA SHINTARO

JP7 patents
⚠️ This page may combine multiple inventors who share the name “UEDA SHINTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM IP HOLDING BV

3 patents
US9190263B2Nov 17, 2015

Method for forming SiOCH film using organoaminosilane annealing

ASM IP HOLDING BV518 citations98
US9117657B2Aug 25, 2015

Method for filling recesses using pre-treatment with hydrocarbon-containing gas

ASM IP HOLDING BV518 citations98
US9029272B1May 12, 2015

Method for treating SiOCH film with hydrogen plasma

ASM IP HOLDING BV526 citations98

UEDA SHINTARO

2 patents
US8592005B2Nov 26, 2013

Atomic layer deposition for controlling vertical film growth

UEDA SHINTARO542 citations97
US8465811B2Jun 18, 2013

Method of depositing film by atomic layer deposition with pulse-time-modulated plasma

UEDA SHINTARO528 citations97

ASM JAPAN

1 patent
US7825040B1Nov 2, 2010

Method for depositing flowable material using alkoxysilane or aminosilane precursor

ASM JAPAN545 citations98

TANIGUCHI TOMOHIRO

1 patent
US8918887B2Dec 23, 2014

Vulnerability-diagnosis device

TANIGUCHI TOMOHIRO2 citations46