Inventor

SUN JENNIFER Y

US178 patents

⚠️ This page may combine multiple inventors who share the name “SUN JENNIFER Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUN JENNIFER Y

APPLIED MATERIALS INC

Non-line of sight deposition of erbium based plasma resistant ceramic coating

Rare-earth oxide based coating

Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles

Rare-earth oxide based monolithic chamber material

Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics

Ceramic coated article and process for applying ceramic coating

Ceramic article with reduced surface defect density and process for producing a ceramic article

Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus

Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas

Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination

Gas distribution showerhead for semiconductor processing

Diamond coated parts in a plasma reactor

Plasma-resistant ceramics with controlled electrical resistivity

Electrostatic chuck having textured contact surface

Process chamber component having electroplated yttrium containing coating

Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate

Copolymerized high temperature bonding component

Chemistry compatible coating material for advanced device on-wafer particle performance

Single-body electrostatic chuck

Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity

Rare-earth oxide based monolithic chamber material

Ion assisted deposition for rare-earth oxide based thin film coatings on process rings

Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxide

Process chamber having a corrosion-resistant wall and method

Plasma erosion resistant rare-earth oxide based thin film coatings

Ion beam sputtering with ion assisted deposition for coatings on chamber components

Plasma resistant ceramic coated conductive article

Low temperature aerosol deposition of a plasma resistive layer

Plasma-resistant, welded aluminum structures for use in semiconductor apparatus

Plasma erosion resistant thin film coating for high temperature application

Multi-layer plasma resistant coating by atomic layer deposition

Zone-controlled rare-earth oxide ALD and CVD coatings

Flourination process to create sacrificial oxy-flouride layer

Multi-layer plasma resistant coating by atomic layer deposition

Plasma erosion resistant rare-earth oxide based thin film coatings

Plasma erosion resistant thin film coating for high temperature application

Ion assisted deposition top coat of rare-earth oxide

SUN JENNIFER Y

Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas

Plasma resistant coatings for plasma chamber components

Protective coatings resistant to reactive plasma processing

Method of producing a plasma-resistant thermal oxide coating

Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating

Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber

Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxide

Clean, dense yttrium oxide coating protecting semiconductor processing apparatus

CANDESCENT TECH CORP

Sealing of flat-panel device

Self-standing spacer wall structures

Low temperature glass frit sealing for thin computer displays

LUBOMIRSKY DMITRY

Electrostatic chuck with advanced RF and temperature uniformity

(unassigned)

Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers