Inventor
GRAVES THOMAS
US4 patents
⚠️ This page may combine multiple inventors who share the name “GRAVES THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUN JENNIFER Y
3 patentsUS8758858B2Jun 24, 2014
Method of producing a plasma-resistant thermal oxide coating
SUN JENNIFER Y38 citations93
US8129029B2Mar 6, 2012
Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating
SUN JENNIFER Y39 citations93
US8871312B2Oct 28, 2014
Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber
SUN JENNIFER Y21 citations92