Inventor

DUAN REN-GUAN

US47 patents

⚠️ This page may combine multiple inventors who share the name “DUAN REN-GUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DUAN REN-GUAN

APPLIED MATERIALS INC

Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics

Ceramic coated article and process for applying ceramic coating

Ceramic article with reduced surface defect density and process for producing a ceramic article

Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus

Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas

Plasma-resistant ceramics with controlled electrical resistivity

Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxide

Plasma resistant ceramic coated conductive article

Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system

Plasma corrision resistive heater for high temperature processing

High temperature electrostatic chuck bonding adhesive

Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide

Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide

Heat treated ceramic substrate having ceramic coating

Plasma corrosion resistive heater for high temperature processing

Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater

Yttria-based material coated chemical vapor deposition chamber heater

Chamber coatings

Method and system for high temperature clean

Ceramic material with high thermal shock resistance and high erosion resistance

Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide

Heat treated ceramic substrate having ceramic coating

Chamber liner for high temperature processing

Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide

Alumina layer formation on aluminum surface to protect aluminum parts

Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance

Chamber liner for high temperature processing

Ceramic article with reduced surface defect density

Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance

Semiconductor processing apparatus with protective coating including amorphous phase

Ceramic component formed ceramic portions bonded together with a halogen plasma resistant bonding agent

Critical chamber component surface improvement to reduce chamber particles

Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof

Processing equipment component plating

Magnetic-material shield around plasma chambers near pedestal

Fluoride coating to improve chamber performance

SUN JENNIFER Y

Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas

Protective coatings resistant to reactive plasma processing

Method of producing a plasma-resistant thermal oxide coating

Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating

Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber

Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxide

High temperature electrostatic chuck bonding adhesive

TAIWAN SEMICONDUCTOR MFG CO LTD

Fluorine-containing elastomer composition and method for making cured fluorine-containing elastomer composition

Multilayer ALD coating for critical components in process chamber

SUN JENNIFER

Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof

UNIV CALIFORNIA

Electrically conductive Si-Ti-C-N ceramics