Inventor
CHEN ERICA
US22 patents
Patents
22 patentsUS11101174B2Aug 24, 2021
Gap fill deposition process
APPLIED MATERIALS INC16 citations85
US10192775B2Jan 29, 2019
Methods for gapfill in high aspect ratio structures
APPLIED MATERIALS INC7 citations84
US9777378B2Oct 3, 2017
Advanced process flow for high quality FCVD films
APPLIED MATERIALS INC18 citations84
US9620407B2Apr 11, 2017
3D material modification for advanced processing
APPLIED MATERIALS INC3 citations72
US12384185B2Aug 12, 2025
Methods, systems, and apparatus for inkjet printing self-assembled monoloayer (SAM) structures on substrates
APPLIED MATERIALS INC0 citations62
US12111572B2Oct 8, 2024
Methods of greytone imprint lithography to fabricate optical devices
APPLIED MATERIALS INC0 citations62
US11735420B2Aug 22, 2023
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC0 citations62
US11709423B2Jul 25, 2023
Methods of greytone imprint lithography to fabricate optical devices
APPLIED MATERIALS INC0 citations62
US11682556B2Jun 20, 2023
Methods of improving graphene deposition for processes using microwave surface-wave plasma on dielectric materials
APPLIED MATERIALS INC0 citations62
US11488856B2Nov 1, 2022
Methods for gapfill in high aspect ratio structures
APPLIED MATERIALS INC0 citations62
US11289331B2Mar 29, 2022
Methods for graphene formation using microwave surface-wave plasma on dielectric materials
APPLIED MATERIALS INC0 citations62
US10964527B2Mar 30, 2021
Residual removal
APPLIED MATERIALS INC0 citations62
US10892161B2Jan 12, 2021
Enhanced selective deposition process
APPLIED MATERIALS INC0 citations62
US10770292B2Sep 8, 2020
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC1 citations62
US12288672B2Apr 29, 2025
Methods and apparatus for carbon compound film deposition
APPLIED MATERIALS INC0 citations59
US11049731B2Jun 29, 2021
Methods for film modification
APPLIED MATERIALS INC0 citations56
US10811303B2Oct 20, 2020
Methods for gapfill in high aspect ratio structures
APPLIED MATERIALS INC0 citations52
US10096512B2Oct 9, 2018
Gapfill film modification for advanced CMP and recess flow
APPLIED MATERIALS INC0 citations52
US9595467B2Mar 14, 2017
Air gap formation in interconnection structure by implantation process
APPLIED MATERIALS INC0 citations52
US12493138B2Dec 9, 2025
Airgap structures for improved eyepiece efficiency
APPLIED MATERIALS INC0 citations51
US9773675B2Sep 26, 2017
3D material modification for advanced processing
APPLIED MATERIALS INC0 citations51
US11955333B2Apr 9, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations43