Inventor
IIJIMA KIYOHITO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “IIJIMA KIYOHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS10403525B2Sep 3, 2019
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD7 citations83
US7245987B2Jul 17, 2007
Cluster tool and transfer control method
TOKYO ELECTRON LTD11 citations82
US11069548B2Jul 20, 2021
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD0 citations61
US8382910B2Feb 26, 2013
Cleaning method for substrate processing system, storage medium, and substrate processing system
TOKYO ELECTRON LTD2 citations61
US6983195B2Jan 3, 2006
Semiconductor processing system and method of transferring workpiece
TOKYO ELECTRON LTD4 citations61
US7681055B2Mar 16, 2010
Control device and method for a substrate processing apparatus
TOKYO ELECTRON LTD6 citations60
US8055368B2Nov 8, 2011
Control device and control method of plasma processing system, and storage medium storing control program
TOKYO ELECTRON LTD0 citations40
US7846257B2Dec 7, 2010
Method for cleaning substrate processing apparatus, substrate processing apparatus, program and recording medium having program recorded therein
TOKYO ELECTRON LTD0 citations40